Target Mask(Chart Mask)
Vision Calibration Chart(Test Targets)
▩ Structure
▩ Specification
Contents | Specification | |
---|---|---|
Grade | B | C |
Minimum Feature size | ≥ 5um ≤ | ≥ 10um ≤ |
Line Width Accuracy | ± 2.0um | ± 4.0um |
Position Accuracy | ± 1.0um (100mm × 100mm) 기준 | |
Chrome Optical Density | 3 ≤ at 430nm | |
Reflectivity(Chrome/ White Glass) | ≥ 3.0% at 430nm |
※ SPEC 조정 요청 시 협의가능
▩ Products
Machine Calibration Chart(Test Targets)
▩ Structure
▩ Specification
Contents | Specification | |||
---|---|---|---|---|
Grade | A+ | A | B | C |
Minimum Feature Size | ≥ 1um | 1um ≤ | 5um ≤ | 10um ≤ |
Line Width Accuracy | ± 0.15um | ± 0.2um | ± 0.5um | ± 1.0um |
Position Accuracy | ± 1.0um ≤ Glass Size ≤ 5.0um | |||
Substrate Plate | Soda line & Quarts Glass | |||
Material Size Thickness | 5” ~ 20” × 24” – 2.3T, 3.0T, 4.8T, 5.0T, 8.0T |
※ SPEC 조정 요청 시 협의가능
▩ Products
Contact
- Tel
- 010-8028-3519
이희영 팀장
- lhy@microimage.co.kr
mi2000@chol.com