마이크로이미지 포토마스크 Photo mask - Target Mask
마이크로이미지
Target Mask(Chart Mask)
Vision Calibration Chart(Test Targets)
▩ Structure



structure



▩ Specification
Contents Specification
Grade B C
Minimum Feature size ≥ 5um ≤ ≥ 10um ≤
Line Width Accuracy ± 2.0um ± 4.0um
Position Accuracy ± 1.0um (100mm × 100mm) 기준
Chrome Optical Density 3 ≤ at 430nm
Reflectivity(Chrome/ White Glass) ≥ 3.0% at 430nm

※ SPEC 조정 요청 시 협의가능




Reflectivity



▩ Products
products



Machine Calibration Chart(Test Targets)
▩ Structure
products



▩ Specification
Contents Specification
Grade A+ A B C
Minimum Feature Size ≥ 1um 1um ≤ 5um ≤ 10um ≤
Line Width Accuracy ± 0.15um ± 0.2um ± 0.5um ± 1.0um
Position Accuracy ± 1.0um ≤ Glass Size ≤ 5.0um
Substrate Plate Soda line & Quarts Glass
Material Size Thickness 5” ~ 20” × 24” – 2.3T, 3.0T, 4.8T, 5.0T, 8.0T

※ SPEC 조정 요청 시 협의가능




Reflectivity



▩ Products
Custom made



Contact
Tel
010-8028-3519
이희영 팀장
E-mail
lhy@microimage.co.kr
mi2000@chol.com
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