![Micro Image - Half Tone](./layouts/eng/image/subImg89.jpg)
![Micro Image - Half Tone](./layouts/eng/image/lnb/tit_89.jpg)
Half Tone
What is Half Tone Mask
Half Tone Mask is while Lithography process, There are areas with different light transmittance in one mask, which is a mask capable of testing the sensitivity of the photosensitive material used in the photo lithography process.
![Half tone mask?](./layouts/default/image/m1/s2_ss1_img1.jpg)
Half Tone Mask Advantage
![Half Tone Mask Advantage](./layouts/default/image/m1/s2_ss1_img2.jpg)
The advantage of Multi Half Tone Mask is that it can check Eop and Eth through one Expose process.
(Simplification of Photosensitive Material Characteristics Test)
Half tone mask Specification
- Pattern : Min Pattern Size 2㎛ ± 0.5㎛
- Transmittance : 0 ~ 80% ± 0 ~ 3%
- Alignment : ± 1 ~ 3㎛
- Wavelength Area : 365㎚ / 413㎚ (Other Area : Further Additional Discussion)
- Transmittance : 0 ~ 80% ± 0 ~ 3%
- Alignment : ± 1 ~ 3㎛
- Wavelength Area : 365㎚ / 413㎚ (Other Area : Further Additional Discussion)
Half Tone Mask Service Size
Size(mm) | Thickness(mm) | Material | Coated | |||||
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2.3 | 3 | 4.8 | 6.35 | 7.8 | Soda Lime | Quartz | Cr | |
126.6 * 126.6 | ![]() |
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152.0 * 152.0 | ![]() |
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177.4 * 177.4 | ![]() |
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※ Due to the nature of the product, the production period and amount will vary depending on the distribution of design and tone. For more details, please contact us by e-mail or wire.