Specification
Photo Mask Specification
| Contents | Specification | ||||
|---|---|---|---|---|---|
| CHROME | EMULSION | ||||
| Grade | A + | A | B | C | D |
| Minimum Feature Size | 1㎛ ≤ | 2㎛ ≤ | 5㎛ ≤ | 10㎛ ≤ | 15㎛ ≤ |
| Line Width Accuracy | ±0.15㎛ | ±0.2㎛ | ±0.5㎛ | ±1.0㎛ | ±2.0㎛ |
| Position Accuracy | ±1.0㎛ ≤ Glass Size ≥ 5.0㎛ | ||||
| Substate Plate | Soda lime Glass & Quarts Glass | ||||
| Material Size Thickness |
5"~850x1400 2.3Tㆍ3.0Tㆍ4.8Tㆍ5.0Tㆍ8.0Tㆍ10T |
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| Surface Coated (Thickness) | Chrome (1,000 ~ 1,250Å) | Emulsion (5,000 ~ 7,500Å) |
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Photo Mask Service Size Specification
| Category | Size (mm) | Thickness(mm) | |||||
|---|---|---|---|---|---|---|---|
| 2.3 | 3.0 | 4.8~5.0 | 6.35 | 8.0 | 10.0 | ||
| Soda lime Chrome mask |
127 x 127 |  |
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| 152 x 152 | |
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| 177 x 177 | |
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| 228 x 228 | |
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| 350 x 350 | |
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| 356 x 356 | |
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| 356 x 432 | |
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| 406 x 533 | |
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| 420 x 520 | |
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| 508 x 610 | |
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| 610 x 711 | |
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| 700 x 800 | |
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| 813 x 1379 | |
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| Quartz Chrome mask |
127 x 127 |  |
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| 152 x 152 | |
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| 177 x 177 | |
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| 228 x 228 | |
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| 350 x 350 | |
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| 420 x 520 | |
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| 508 x 610 | |
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| 700 x 800 | |
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| 800 x 920 | |
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| 850 x 1200 | |
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| 850 x 1400 | |
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| Soda lime Emulsion mask |
356 x 432 |  |
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| 406 x 533 | |
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| 508 x 610 | |
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| 610 x 813 | |
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※ In case of irregular size and thickness through s pre-consultations will consult.
