Half Tone
What is Half Tone Mask
Half Tone Mask is while Lithography process, There are areas with different light transmittance in one mask, which is a mask capable of testing the sensitivity of the photosensitive material used in the photo lithography process.
Half Tone Mask Advantage
The advantage of Multi Half Tone Mask is that it can check Eop and Eth through one Expose process.
(Simplification of Photosensitive Material Characteristics Test)
Half tone mask Specification
- Pattern : Min Pattern Size 2㎛ ± 0.5㎛
- Transmittance : 0 ~ 80% ± 0 ~ 3%
- Alignment : ± 1 ~ 3㎛
- Wavelength Area : 365㎚ / 413㎚ (Other Area : Further Additional Discussion)
- Transmittance : 0 ~ 80% ± 0 ~ 3%
- Alignment : ± 1 ~ 3㎛
- Wavelength Area : 365㎚ / 413㎚ (Other Area : Further Additional Discussion)
Half Tone Mask Service Size
Size(mm) | Thickness(mm) | Material | Coated | |||||
---|---|---|---|---|---|---|---|---|
2.3 | 3 | 4.8 | 6.35 | 7.8 | Soda Lime | Quartz | Cr | |
126.6 * 126.6 | ||||||||
152.0 * 152.0 | ||||||||
177.4 * 177.4 |
※ Due to the nature of the product, the production period and amount will vary depending on the distribution of design and tone. For more details, please contact us by e-mail or wire.